Design and optimization of piezoelectric actuators for microflap-embedded micropumps

In this paper, we propose a new method to use cost-effective multi-sheet off-the-shelf piezoelectric material (e.g. PZT) as an actuator for micropumps. Instead of one customized single PZT sheet that is typically expensive, multiple commercially available sheets are utilized decrease the cost fabrication. For purpose, have derived analytic equations expressing natural frequency and mode shape actuator. The FEM simulations verify equations. Thanks their high accuracy, can utilize fitness functions genetic algorithm (GA) optimization purpose physical aspects. Our experimental measurement results show GA capable optimizing parameters Moreover, one-way compliant microflaps presented first time act valves micropump aided by our proposed flow rate configuration compared with single-sheet in order demonstrate effect optimized actuators practical applications